Scanning electron microscope

Merlin

Field Emission Scanning Electron Microscope (FE-SEM) with energy-dispersive X-ray spectroscopy (EDS), local charge compensation.

Scanning electron microscope

EVO LS 10

Conventional scanning electron microscope for wide range of life science samples with Variable and Extended pressure modes and energy dispersive spectrometer

Scanning electron/ion microscope

Auriga CrossBeam Workstation

Study of morphology, chemical, and structural material properties with nanoscale resolution. Field Emission Scanning Electron Microscope (FE-SEM) with focused ion beam (FIB), electron backscatter diffraction (EBSD), energy-dispersive X-ray spectroscopy (EDS), local charge compensation, and E-beam lithography.

Scanning electron microscope

VEGA 3 SBH

Scanning electron microscope with an energy-dispersive attachment for elemental microanalysis and vacuuming of samples

Scanning probe microscope

Asylum MFP 3D SA

Highest sensitivity, broad spectra of local electrical measurements. Micro- and nano- relief of the surface; Conductivity and spreading resistance; Work function of electrons; Spatial distribution of surface potential; Electromechanical properties; Spatial distribution of magnetic properties

Scanning probe microscope

NanoScan-4D

Measuring of hardness and elastic module by nanoindentation and surface topography on nanometer scale.

Scanning probe nanolaboratory

NTEGRA Aura

Measurements in vacuum and controlled atmosphere. Piezo-response force microscopy; Contact scanning capacitance microscopy; Atomic-force acoustic microscopy; Measurements in liquid; Sample heating.

Scanning probe nanolaboratory

NTEGRA Therma

Scanning probe nanolaboratory

NTEGRA Prima

Probe nanolaboratory

NTEGRA Spectra

Integration of scanning probe microscopy with confocal microscopy and Raman spectroscopy

Confocal Raman microscope

Alpha 300 AR

Nondestructive chemical analysis and surface relief mapping. Confocal microscopy in reflected light; Fluorescent and Raman spectroscopy; 3D layer mapping

Optical microscope

Olympus BX61 TRF

Wide range of optical microscopy investigations with automatic image analysis. Fully motorized

Optical profilometer

WYKO NT1100

Noncontact fast measurements of surface topography from nanometer scale roughness through millimeter scale steps

Optical measuring system

Kestrel-200 Peregrine

Wide range of fast and accurate non-contact 2-axis measurements

Vibrating sample magnetometer

7407 VSM

Measurements of magnetic moments of bulk and thin film samples

UV-Vis-NIR double beam spectrophotometer

Agilent Cary 5000

Measurements of absorbance and reflectance at specific wavelengths or over a range for absolute or relative comparisons of solid and liquid samples

Multifunctional system for comprehensive evaluation of piezo - and ferroelectric materials

TF Analyser 2000

Measurement and analysis of ferroelectric, piezoelectric, pyroelectric and dielectric properties in thin films and bulk materials

Magnetron Sputtering System

ATC ORION 8 UHV

Sputtering of multilayer and composite metal, dielectric and magnetic films

Combined Vacuum Thin Films Deposition System

Auto 500 Edwards

Deposition of metal and dielectric thin films by electron-beam evaporation and DC/RF magnetron sputtering

Electron Spin Resonance Spectrometer

Bruker EMX Plus

Continuous wave detection Electron Spin Resonance (EPR) and Electron-Nuclear-Double Resonance (ENDOR) at frequencies up to 100 Mhz

Measurement system

Dryogenic DMS-1000

Cryogen-free investigation of various physical properties in wide temperature range and high magnetic fields

Thermogravimetric setup

DynTherm LP-ST

Measurement of the samples’ mass changes with respect to the temperature and gas atmosphere

Water Purification System

Elix 10

Production of ultrapure (type I) deionized water with recirculation line

Precision Lapping and Polishing Machine

Logitech PM5

Precision lapping and polishing of crystalline wafers

Automated device for magnetocaloric effect measurements

MagEq MMS

Direct measurements of adiabatic temperature changes initiated by changes of magnetic field and heat capacity at different magnetic fields

Permagraph

Permagraph L

Measurement of magnetic hysteresis characteristics of magnetic materials.

Magnetooptical Kerr-microscope

Combined microscope

Visualization of magnetic domains and automatic measurement of magnetooptical hysteresis loops

Particle Size, Zeta-Potential and Molecular Weight Analyzer

Malvern Zetasizer Nano ZS

Measurement of size distribution, Zeta-potential and molecular weight of nanoand submicro-particles and molecules in colloid solutions

Dilatometer

Netzsch DIL 402 C

Measurement of linear thermal dilatation of solid and liquid powders, pastes and ceramic fibers

Gas-Analysis System

Netzsch STA 409 Luxx/QMS 403 C

Qualitative and quantitative analysis of gaseous decomposition products of inorganic matters.

Thermogravimetric analyzer

Netzsch STA 409 PC Luxx

Simultaneous Thermo Analysis (TG-DSC or TG-DTA) in wide temperature range

Wet Process System

OPTIwet ST30

Automatic multi-step spin wafer cleaning, resist development, and resist stripping

Reactive Ion Etching System

Plasmalab 80 Plus RIE

Plasma reactive ion etching of metals, Si and Si compounds, and dielectrics.

Synchronous DCK/DTA and thermogravimetric analyzer

PYRIS 1 TGA

Thermobalance is a representative of a new generation of thermal analyzers, combining high sensitivity, accuracy and reproducibility

SQUID-Magnetometer

MPMS XL7

Measurement of magnetic properties with high sensitivity in wide temperature range

Rotary Viscometer

Rheotest RN 4.1

Determination of rheological parameters: viscosity, shear stress, and shear rate

Total reflection x-ray fluorescence spectrometer

Rigaku Nanohunter

Investigations in the field of material science, microelectronics, products composition control, legal expertise

Laboratory Spin Coater

Sawatec SM180-HP250HDMS

Resist spin coating and thermal backing

Test Machine

Shimadzu AG-50kNXD

Carrying out mechanical tests for stretching and compression of various materials

Diffractometer

Shimadzu XRD 7000S

X-ray diffraction analysis of polycrystalline materials.

Manual Contact Mask Aligner

SUSS MJB4

Alignment of photomask with wafer and resist exposition for contact lithography

Atomic-emission spectrometer with inductively coupled plasma

iCAP 6500 Duo

Quantitative and qualitative elemental analysis with simultaneous detection of up to 40 elements

Atomic Absorption Spectrometer

Solaar M6

Qualitative elemental analysis of different samples for inorganic components

Specific Surface Area Analyzer

TriStar 3000

High-quality surface area and porosimetry measurements on solid materials by using the technique of gas adsorption and desorption

Laser System for Material Processing

VL-300/40

Laser marking, engraving, and cutting of wide range of materials

High resolution mass spectrometer

Waters Xevo QTOF

Quadrupole (Q) and time-of-flight (Tof) high resolution mass spectrometer